Abstract
This paper describes the design, experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems (MOEMS) technology. The tunable filter can meet the demodulation requirements for Fiber Bragg grating (FBG) sensors. The hybrid system is built using an off-the-shelf 200-GHz dense wavelength-division multiplexing filter and a movable MEMS platform actuated by a thermal microactuator array fabricated with silicon-on-insulator multiuser MEMS processes. Results show a repeatable tuning range of over 400 pm, which satisfies the demodulation requirements for FBG sensors.
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