Abstract
This paper describes the effort undertaken at General Motors Research to build a plasma immersion ion implantation (PIII) system in order to study the potential of pulsed implantation as a means of modifying the tribological properties of automotive parts and to investigate the feasibility of producing surface modified components. The system has been designed for high dose ion implantation of irregularly shaped objects. It consists of a stainless steel vacuum chamber evacuated by a cryopump system, standard plasma diagnostic tools, a ring-cusp hot filament plasma source and a custom designed 150 kV, 10–20 μs pulser. Details of the system are discussed together with justification for our choice of the specific components and the adopted techniques.
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