The start-up and preliminary operation of the 60 kV plasma ion implantation system

J.H Kim,Y.Z You,S.A Nikiforov,G.H Rim,S.V Shenderey,J Kim

doi:10.1109/plasma.2003.1229943

The start-up and preliminary operation of the 60 kV plasma ion implantation system

J.H Kim, Y.Z You + Show 4 more

https://doi.org/10.1109/plasma.2003.1229943

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Publication Date: Jun 5, 2003

Affiliation: Korea Electrotechnology Research Institute

#Plasma Immersion Ion Implantation #Ion Implantation System + Show 8 more

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Abstract

Summary form only given, as follows. The paper presents the result of start-up and preliminary operation of the 60 kV, 100 L plasma immersion ion implantation (PI/sup 3/) system for material processing.

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