Modification of mechanical and chemical surface properties of metals by plasma immersion ion implantation

Abstract

Plasma immersion (ion) implantation (PII) was developed a decade ago for modifying mechanical and chemical surface properties of metals. In analogy to conventional beam-line ion implantation, it uses energetic ions, mostly nitrogen, that are implanted in the near-surface region of a material. A sample is enveloped by a plasma and subjected to negative high-voltage pulses. In the electrical field, the ions are accelerated to high energies and incorporated into the sample. This process takes place at all sides of the sample simultaneously without requiring ion beam and sample manipulation, in contrast to beam-line ion implantation. The present review discusses the fundamentals of PII and its most important features. The influence of the most important process parameters such as implantation dose, ion density, pulse repetition rate, and sample temperature on hardness and wear resistance and on corrosion resistance of metals and alloys such as mild steel, stainless steel, nickel, aluminium and titanium alloys is discussed.