Abstract
Abstract Design, technology and properties of a completely ceramic piezoelectric pressure sensor are described. The sensor is made of the LTCC (Low Temperature Co-fired Ceramics) with PZT (Lead Zirconate Titanate) transducer and is designed to withstand pressure up to 10 MPa. The device is a sensor and a package simultaneously. It can be directly screw mounted to a flat surface with a hole supplying a pressure. Two methods of detection are considered: shift of the resonant frequency for static loads detection and charge response for dynamically changing load. Measurements are carried out for maximum 6 MPa pressure. The sensor exhibits linear charge response and resonant frequency shift in tested range.
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