Abstract
AbstractHeterostructure tunable LC devices utilizing ferroelectric BST((Ba,Sr)TiO3) and ferromagnetic LSMO((La,Sr)MnO3) thin films were developed. Both LSMO and BST thin films were prepared by chemical solution deposition. New heterostructure tunable devices, which were composed of MIM‐type ferroelectric C and spiral‐type ferromagnetic L, were fabricated as the following order: ferromagnetic LSMO thin films were deposited on SiO2/Si substrate and platinum was deposited as a diffusion barrier and ferroelectric BST thin films were deposited and spiral‐type metal (Pt/Ti) coils were patterned using lift‐off process. The heterostructure tunable device showed large C–V tunability, 58% and also L–V tunability, 11.5% in voltage ranges of –10 V to +10 V. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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