Abstract
The dependences of the main statistical characteristics of the surface (correlation functions, surface-height distribution functions, correlation length, width of interface), average height and lateral size of grains on the formation conditions have been determined by atomic force microscopy for hemispherical-grain polycrystalline silicon Films (HSG-Si). Dependence of grains shape on the deposition temperature and film thickness is found.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
