Abstract
In this work, Yb was added as a third element to CrN as a means of developing new hard coatings materials via solution hardening. Cr–Yb–N thin films were prepared on Si substrates by pulsed laser deposition with various Yb contents, and compositional analysis confirmed that these films contained the expected elements. Phase identification results showed that the Cr1−xYbxN thin films for x ≤ 0.23 consisted of YbN in CrN as a solid solution with B1-(Cr,Yb)N as the only phase. However, films having x values of 0.51 or 0.53 had a two phase structure comprising (Cr,Yb)N and YbN. The hardness of each Cr–Yb–N thin film was successfully improved compared to that of a pure CrN thin film.
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