Abstract
ABSTRACTElectrical current induced joule heating method was applied to crystallization of 50 nm-thick amorphous silicon films formed on glass substrates. Voltages were applied to silicon films connected with a capacitance in parallel. Irradiation with 5 ns-pulsed-laser melted films partially and caused electrical current induced joule heating because of reduction of electrical resistance. Lateral grain growth with 12.6 µm was realized using the tapered-shaped-electrodes to apply voltages to silicon films with a capacitance of 0.33 µF. For 2.6×1017cm−3phosphorus-doped films, analysis of temperature change in the electrical conductivity gave that defect states at grain boundaries was low of ∼1017cm−3.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
