Abstract

Thin metallic films implanted with different ions were investigated by high-voltage transmission electron microscopy and selected area diffraction. Formation of glassy or crystalline stable and metastable phases by ion implantation will be discussed. A criterion is proposed to parametrize the occurence of glassy alloys after ion implantation. The possibility to develop dose-temperature-transformation-diagrams (DTT-diagram) of iron phases after metalloid implantation in a selected dose and temperature range will be demonstrated by boron implantation into iron films. The influence of the annealing temperature of the phase transformation will be discussed.

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