Abstract
The two-step ion exchange process for the fabrication of optical waveguide structures in glass is studied. The first step is field-assisted ion exchange through the structure forming ‘‘windows’’ in the masking films. It is established that, in the case of metal masking films, the exchange ability of glass in the region under the mask decreases significantly. The second ion exchange in these regions is even totally blocked when soda-lime glass is used. The mechanism and the application of this effect are briefly considered.
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