Abstract
Pb ( Zr 0.4 Ti 0.6 ) O 3 thin films with a thickness of 500nm were spin coated on (110) preferred Pt bottom electrodes using a sol-gel method, in which the (110) preferred Pt bottom electrode was developed by using a (100)-oriented conductive oxide electrode LaNiO3 film as an adhesion layer on a SiO2∕Si substrate. X-ray diffraction analysis and field emission scanning electron microscopy show that the as-grown Pb(Zr0.4Ti0.6)O3 films are highly (110)-oriented with a columnar structure. It indicates that the (110) preferred Pt bottom electrode is effective for growing highly (110)-oriented Pb(Zr0.4Ti0.6)O3 films. The as-grown Pb(Zr0.4Ti0.6)O3 films show excellent dielectric and ferroelectric properties with dielectric constant ε33T∕ε0=1620, loss tangent tanδ=2.1%, spontaneous polarization 2Ps=158μC∕cm2, and remnant polarization 2Pr=92μC∕cm2. Excellent pyroelectric properties are also detected in the (110)-oriented films. At room temperature, the pyroelectric coefficient and the figure of merit for detectivity can reach up to 7.8×10−4Cm−2K−1 and 1.79×10−5Pa−0.5, respectively.
Published Version
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