Abstract
A (110) preferred Pt electrode by using a (100)-oriented conductive oxide electrode LaNiO 3 film as an adhesion layer on a Îł - Al 2O 3 (100)/Si substrate has been deposited by RF magnetron sputtering. It was found that the phase instability of LaNiO 3 almost has no effect on the (110)-orientated Pt growth. Highly (110)-textured Pb(Zr 0.40Ti 0.60)O 3 films can been achieved when it was deposited on the (110) preferred Pt bottom electrode. The as-grown Pb(Zr 0.40Ti 0.60)O 3 films possesses excellent dielectric, ferroelectric and pyroelectric properties. The results indicate that the Pt / LNO / Îł - Al 2O 3/Si substrate is attractive for depositing highly (110)-orientated ferroelectric films with perovskite structure and the highly (110)-orientated Pb(Zr 0.4Ti 0.60)O 3 films are promising for sensor and actuator applications.
Published Version
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