Abstract
Al 2O 3 coatings were fabricated on CLAM steel substrates at 300 °C by RF magnetron sputtering, and Si xC 1 − x coatings with different Si concentrations were then fabricated on the Al 2O 3 coatings by pulse magnetron sputtering. The coating composition, topography, structure and mechanical properties were investigated by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM), X-ray diffractometry (XRD), Raman spectroscopy, nano-indentation techniques and scratch tests. The results show that Si xC 1 − x coatings had Si contents in the range 39–62 at.%. Al 2O 3 coatings exhibited an island growth mode, while Si xC 1 − x coatings showed a step flow growth mode. Compact and crack-free Si xC 1 − x /Al 2O 3 Coatings were prepared. α-Al 2O 3, α-Cr 2O 3 and spinel Fe 2CrO 4 were all detected in the Al 2O 3 coating by Raman spectroscopy. The hardness and elastic modulus of the Al 2O 3 coating were 15.5 ± 1.0 and 194.8 ± 7.2 Gpa, respectively. The hardness and elastic modulus of Si xC 1 − x layer were 28.6 ± 0.8 Gpa and 219.2 ± 2.6 Gpa, respectively, for Si content of ≈ 49 at.%. The adhesion of C-rich and stoichiometric Si xC 1 − x /Al 2O 3 coatings were superior to those of Si-rich coatings.
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