Fabrication of Ferroelectric Microstructures by Electron-Beam-Induced Patterning Process

Abstract

0.5 to 500μ m-sized square dots of (Pb,Sr)TiO 3 micropatterns were fabricated by electron-beam-induced micropatterning process using scanning electron microscope (SEM)-based electron beam lithography system. Using SEM and atomic force microscope observation, obtained dots over 1μ m square exhibits sharp edge, however 0.8μ m square dots have a round edge. In 500μ m square pattern, piezoelectric hysteresis curve was observed by piezoresponse scanning force microscopy.