Fabrication of Lead-Free Ferroelectric Microstructures by Electron-Beam-Induced Patterning Process

Abstract

300 nm to 50 μm-sized circular dots of Bi 4 Ti 3 O 12 (BIT) and BaTiO 3 (BT), lead-free ferroelectric materials, micropatterns were fabricated by electron-beam-induced micropatterning process using scanning electron microscope (SEM)-based electron beam lithography system. Obtained micro dots were characterized using optical microscope and atomic force microscope. The piezoelectric property of the BIT and BT micro dots were examined by piezoresponse scanning force microscopy, but those dots did not show piezoelectricity because of low crystallinity of the micropatterns. Further research for EB condition is needed to fabricate microstructures with ferroelectric properties.