Abstract

ZnO nanowires were grown on GaAs(002) single-crystal substrates using metal–organicchemical vapour deposition. X-ray diffraction analysis, scanning electron microscopy andphotoluminescence spectroscopy were carried out to characterize their crystallinity,orientations, dimensions and optical properties. It was demonstrated that well alignedarrays of single-crystalline ZnO nanowires with sharp tips could be grown on GaAssubstrates using a typical thin film deposition technique without catalysts. The applicationpotential of the nanowires as probes of atomic force microscopes (AFMs) wasthen discussed by predicting their structural compatibility with AFM cantileversbased on continuum elasticity and finite element analysis. Theoretically estimatedmechanical properties of the ZnO nanowires suggested that they are structurallycompatible with typical AFM cantilevers while maintaining mechanical stability duringoperation and they are therefore promising candidates for high aspect ratio probes.

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