Energy and mass analysis of secondary ions sputtered from metallic targets by MeV heavy ions

Abstract

The success of heavy ion induced desorption mass spectrometry and the discovery of anomalously high sputtering yields in some dielectric substances underscore the need for a more complete understanding of the interaction of MeV heavy ions with surfaces. Here, we report initial results of a study of the interaction of MeV ions with the surfaces of elemental metallic targets. Secondary ion mass and energy spectra have been measured for Cu, Nb, and Ta targets bombarded by 75 MeV 79Br 8+ ions. Sputtered metal ions and surface contaminants have been observed. The energies of the emitted ions are, on average, lower than for keV ion bombardment.