Abstract
The effect of electron beam irradiation on second harmonic generation of BaTiO3 thin films was studied. Enhanced second harmonic intensity was measured from BaTiO3 thin films irradiated by electron beams of 10, 15, and 25 keV using a scanning electron microscope. The enhancement of the second harmonic generations is attributed to the electron beam-induced poling of the film. The effectiveness of the electron beam irradiation on second harmonic generation enhancement is comparable to that of the corona poling of the film at room temperature. This electron beam induced poling technique offers a promising method for nonlinear optical device fabrication.
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