Abstract
We report the results of our experimental investigations on the synthesis of ceramic protective coatings based on zirconium oxide stabilized with yttrium oxide (ZrO<sub>2</sub>-Y<sub>2</sub>O<sub>3</sub>) by electron-beam evaporation of a solid target in the forevacuum pressure range (5-50 Pa). The mass-to-charge composition of the beam plasma was measured in the course of target evaporation. The obtained thick coatings (over 100 &mu;m) have a columnar structure. The article includes analysis of the factors that affect changes in morphology, hardness, and tribological properties of the obtained coatings.
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