Measurement of mass-to-charge beam plasma ion composition during electron beam evaporation of refractory materials in the forevacuum pressure range

Abstract

We describe here the design of the modernized ion-optical system (IOS) of the standard residual gas analyzer (RGA). IOS electrodes are made of stainless steel. The electrodes are powered outside the vacuum chamber. Reducing the diameter of the entrance aperture to 0.6 mm made it possible to expand the measurement range. These design features of this system makes it possible to measure the mass-to-charge composition of beam plasma ions generated by electron beam evaporation of ceramics and refractory metals in the forevacuum pressure range under a prolonged exposure to high temperature. We present the results of the measured plasma composition during evaporation of aluminum oxide and zirconium ceramics, as well as of titanium.