On the effect of ceramic target composition on coatings deposited by electron-beam evaporation at forevacuum pressure

Yu G Yushkov,E.M Oks,K.V Oskomov,A.V Tyunkov,E.V Yakovlev,A Yu Yushenko,A.A Plaskeev,D.B Zolotukhin

doi:10.1016/j.ceramint.2020.07.259

On the effect of ceramic target composition on coatings deposited by electron-beam evaporation at forevacuum pressure

Yu G Yushkov, E.M Oks + Show 6 more

https://doi.org/10.1016/j.ceramint.2020.07.259

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Journal: Ceramurgia International	Publication Date: Jul 30, 2020
Citations: 5

Affiliation: Institute of High Current Electronics, Tomsk State University of Control Systems and Radio-Electronics, Research Institute of Semiconductor Devices

#Fore-vacuum Pressure Range #Evaporation Of Targets + Show 8 more

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Abstract

We have explored the features of coatings deposited by electron-beam evaporation of ceramic targets with different elemental composition in the fore-vacuum pressure range. The mass-to-charge composition of the beam-plasma formed, and the composition and characteristics of the coatings deposited by evaporation of ceramic targets of various different compositions have been investigated. The influence of target material elemental composition on the parameters of coatings deposited on a titanium substrate are assessed, including elemental composition, surface profile, microhardness, and Young's modulus.

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