Electrical breakdown in dual-frequency capacitively coupled plasma: a collective simulation

Abstract

Most plasma sources have to undergo a breakdown process, during which, energy is injected, and particles are ionized. However, we still know little about this fast evolution process. In this work, a one-dimensional direct implicit particle-in-cell/Monte-Carlo collision (PIC/MCC) program is used to study the breakdown process of a capacitively coupled plasma (CCP) driven by dual radio frequencies. The results show that the breakdown process can be divided into three phases: the pre-breakdown, transition, and post-breakdown phases. In the pre-breakdown phase, the plasma density and heating power grow exponentially. The electric field can penetrate the whole discharge region without any shielding, resulting in a higher-than-average electron energy. Secondary electron emission is critical to grow the electron numbers under these discharge conditions. During the transition phase, the formation of sheaths maximizes the electron generation rate and heating power. The formation of sheaths also causes a drastic change in the electrical characteristics of CCP devices. In the post-breakdown phase, the plasma parameters gradually evolve until a steady state is reached. The decreasing rate of generation and the increasing rate of particle loss gradually equalize. The trends of the power gain and plasma loss are similar to the curves for the particle generation and loss rates, and a dynamic equilibrium is finally reached in the last steady state.