Numerical Analysis of the Breakdown Process of CF3I at Low Pressure

Abstract

The breakdown of CF3I gas at low pressure is of significant importance for applications in fields such as aerospace and microelectronics. However, the DC low-pressure breakdown characteristics of CF3I remain underexplored. In this work, we utilize a one-dimensional implicit particle-in-cell/Monte Carlo collision (PIC/MCC) algorithm to investigate the complete DC breakdown process of low-pressure CF3I. Our model accounts for ion–molecule collisions, recombination reactions, and external circuit influences. The breakdown process is delineated into three stages: before breakdown, breakdown, and after breakdown. In the before-breakdown stage, both the density and energy of particles are low. In the breakdown stage, the rapid increase in electron density and energy accelerates ionization reactions, leading to successful breakdown. The circuit behavior transitions from capacitive to resistive, sharing voltage with the external resistance. In the after-breakdown stage, continued positive ion growth leads to the formation of a thin anode sheath and a negative plasma potential. Energy production, including heating power and secondary electron emission (SEE) power, balances with energy loss through collision and boundary absorption. Specifically, 62% of the total heating power comes from positive ions, 1.5% from negative ions, and approximately 85% of electron energy is lost via boundary absorption. Finally, we compare the Paschen curves of CF3I with those of SF6, providing insights that are beneficial for the application of CF3I as an SF6 alternative.