Abstract
Abstract We report a comparison of inferred electron density (ne) in a He capacitively-coupled plasma, deduced from Laser-Collision Induced Fluorescence measurements, with values computed using a hybrid simulation framework based on Particle-in-Cell / Monte Carlo Collisions simulations and a fluid model for excited He atoms. The studies were carried out for gas pressures between 50mTorr and 1000mTorr and peak-to-peak radio-frequency (13.56 MHz) voltages between 150V and 350 V, in a highly symmetric source equipped with plane-parallel electrodes. A good agreement is found between the experimental and modeling results for ne except at the lowest operating voltages and gas pressures. The (effective) electron temperature (Te) values derived by the two methods agree as well reasonably within the plasma
bulk. The simulation results are used to compare the density distributions of He+ and
various He excited levels and their major populating and de-populating channels at
100 mTorr and 1000 mTorr.
Published Version
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