Abstract
(Bi,La)4Ti3O12 (BLT) thin films were prepared on Pt-coated Si (Pt/Ti/SiO2/Si(100)) substrates by chemical solution deposition method. The effect of heating process on structural and electrical properties of BLT thin films was investigated. The c-axis preferentially oriented films were obtained by lower drying temperature with heating from bottom by a hot plate or IR lamp heater. On the other hand, randomly oriented films were obtained by higher drying temperature with heating from top of films by IR lamp heater or with heating substrate all around by tube type furnace. The orientation of BLT thin films deposited on Pt-coated substrates can be controlled by heating process.
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