Abstract
In this paper, the radiation effect of gamma irradiation (60Co) on the Au/Ni/β-Ga2O3 vertical Schottky barrier diodes (SBDs) was investigated for total doses of about 1 Mrad (Si). The SBDs were characterized by current density–voltage (J–V) and capacitance–voltage (C–V) measurements. Compared with original β-Ga2O3 SBDs, it was found that Schottky barrier height Φb increases from 1.08 to 1.12 eV, the ideality factor n decreases from 1.07 to 1.02, and the specific on-resistance Ron,sp decreases from 3.34 to 2.95 mΩ·cm2 for the irradiated β-Ga2O3 SBDs. In addition, the carrier concentration calculated from the C–V measurements increases slightly after gamma irradiation. The temperature-dependent current–voltage characteristics and conductance-frequency measurements indicate that the Schottky contact interface of β-Ga2O3 SBDs had been slightly improved after irradiation. These results suggest that β-Ga2O3 SBDs have high intrinsic gamma irradiation hardness.
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