Abstract
This article presents a 36-channel scanning light detection and ranging (LiDAR) sensor with an on-chip single-photon avalanche diode array. The sensor has an area-efficient 11-bit in situ histogramming time-to-digital converter with a 3000 ×78 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> per channel area based on a mixed-signal accumulator, though it is incorporated with histogramming and filtering capabilities. Furthermore, owing to its embedded interference (IF) filter, the sensor can perform reliable direct time-of-flight measurements even with IF from 32 different LiDAR sensors. The LiDAR system also has a beam scanner that comprises dual laser diodes for IF elimination and a hybrid mirror such that high-resolution images with a resolution of 2200 ×36 can be acquired with a wide field-of-view of 120 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> ×8 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> .
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