Direct modification of conductive AFM probes by focused electron beam induced deposition

Abstract

In this study, the method of direct modification of conductive atomic force microscopy (CAFM) probes using focused electron beam induced deposition (FEBID) of platinum (Pt) nanowire is presented. This method allows the restoration of broken tips, as well as regenerates the conduction. The length and diameter of the modified tips were optimized by changing the duration time and electron beam current. The tip diameter before modification was measured to be approximately ∼50 nm, and that after modification was measured to be approximately ∼15 nm, which was significantly decreased. The AFM images of topography and current were collected from the fabricated samples with circular array structures using both commercial and Pt nanowire modified CAFM probes. The resistance of FEBID modified probes was obtained using CAFM voltage spectroscopy in the contact mode on a sputtered Pt surface. The results show that the modified probes exhibit a superior spatial resolution and high stability during AFM scans, which provide a significant advancement for CAFM measurements.