Abstract
Focused particle beam-induced processing.
Highlights
In light of the success of 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, one may wonder whether an analogous approach exists on the nanometer scale
In focused electron beam-induced deposition (FEBID), a highly focused electron beam, in most cases provided by a scanning electron microscope, is raster-scanned over a substrate surface on which an adsorbed precursor layer is sustained by a precursor gas injection system
In this Thematic Series, the FEBID process is considered from different perspectives
Summary
In light of the success of 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, one may wonder whether an analogous approach exists on the nanometer scale. This article is part of the Thematic Series "Focused particle beam-induced processing". With the aid of focused particle beam-induced deposition (FPBID) it is possible to create solid-state structures on the nanoscale.
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