Abstract

In the direct etching of spin-on-glass (SOG) films exposed using synchrotron radiation (SR) in the soft X-ray region at room temperature, etching depth increased with the SR dose. The etching rate of SOG films with organic content was much higher than that of SOG films without organic content. X-ray photoelectron spectroscopy (XPS) observation showed that the etching mechanism of SOG films without organic content was mainly SiO desorption and that of SOG films with organic content was mainly SiO and oxygen desorption. A 2 µm line and space etching pattern was transferred to SOG films with good fidelity by SR exposure.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.