Abstract
The properties of spin-on glass (SOG) film modified by 100 keV Ga +, Ar +, N + and He + ion beam irradiation were investigated by Fourier transform infrared absorption spectroscopy and X-ray photoelectron spectroscopy. SOG becomes insoluble to methanol by the ion beam irradiation and can be used as negative resist for ion beam irradiation at doses ranging from 1×10 13 to 2×10 14 cm −2, depending on the ion mass. A cross-linking reaction in SOG material by ion beam irradiation is probably the main cause for this change of SOG, and it is found that both nuclear and electronic collisions in SOG film are responsible for this reaction.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
