Abstract
Diamond deposition has been investigated in a magnetoactive microwave discharge, in which a collisionally damped electron cyclotron resonance (ECR) is established by a Nd–Fe–B permanent magnet structure. Diamond crystals exhibiting a well defined 1333 cm−1 diamond Raman peak and a faceted crystal structure can be grown in hydrocarbon gas mixtures at total pressures 2.0–20 Torr, backside substrate temperatures 550–650 °C, and input microwave power levels 400–1000 W. The main effect of the magnetic field is to increase gas dissociation; optical emission spectroscopic measurements show much higher neutral radical line intensities compared to operation with no magnetic field.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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