Abstract
Capacitive measuring transducers are the most stable of the sensors of physical quantities, so they are used in such areas and on products in which the parameters of time and parametric stability are the main parameters. Such products and systems include rocket and space technology, aviation, military equipment and weapons. In addition, capacitive measuring transducers are energy-saving, since the sensor element does not consume electrical energy during operation. To achieve high time and parametric stability, the design of measuring transducers must be designed using certain design and technological solutions aimed at eliminating the occurrence of unintentional internal mechanical stresses, and compensating for thermal stresses. In addition, capacitive measuring transducers must be guaranteed to be sealed, and also during their manufacture, all parts undergo a degassing operation, in which moisture dissolved in the near-surface layers of materials is removed by heat treatment in vacuum, as well as using methods of heterization of vacuum cavities.
Published Version
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