Development and application of a new enzyme sensor type based on the MOS-capacitance structure for bioprocess control

Abstract

On the surface of pH-sensitive MOS-chips consisting of Si/SiO2/Si3N4/Ta2O5 layers and pF-sensitive MOS-chips consisting of Si/SiO2/Si3N4/LaF3 layers, enzymes were immobilized by common techniques, the capacitance change at a constant voltage or the voltage change at a constant capacitance were measured by means of a C/V-instrument in a “constant charge mode”. These biosensors and a reference electrode were integrated into an FIA-system, and the concentration of penicillin and urea (with pH-sensor) and H2O2 and glucose (with pF-sensor) were determined.