Determination of activation energies for diamond growth by an advanced hot filament chemical vapor deposition method

Abstract

The activation energies for diamond growth were determined by an advanced hot filament chemical vapor deposition (AHF-CVD) method, which accurately controls the substrate temperature independently against other CVD parameters. The activation energies, as determined from an Arrhenius plot, were 22–24 kcal/mol in the range of 740–930 °C. These values are the lowest level reported in the literature. Reported growth mechanisms were evaluated in view of the obtained activation energies.