Study of the synthesis of WO3 nano-structured arrays by tungsten hot filament chemical vapor deposition method and their field emission properties

Abstract

Recently the inorganic semiconductor nanomaterials were of much interest for field emission (FE) applications.[1] Tungsten tri-oxides (WO 3 ) is kown as an interesting semiconductor material for the electrohromic (EC) effect and numerous applications.[2] Nevertheless, the field emission (FE) properties from the WO 3 nano-wires array were also appealing and made it a potential material for the field emission application. There are two main methods by CVD method: (1) evaporation of WO 3 powder[3] and (2) oxidation of the heated tungsten[4]. Here in this work, the hot filament chemical vapor deposition method is adopted, with an extra heating stage is employed as well, to control the substrate temperature precisely. Since this method, different kinds of WO 3 nano-structure arrays were prepared, and their FE properties were studied.