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Abstract
Monoclinic VO2 films were prepared over quartz substrates through thermal oxidation of sputtered vanadium films under continuous O2 flow in a vacuum. It was found that an additional vacuum pre-heating before the thermal oxidation could have a great effect on film crystalline orientation and textual morphologies. The film exhibits a preferable growth along [011] direction and consists of uniform small inter-connected nanoparticles, while the untreated film shows (200) orientation and is composed of large irregular nanoparticles that connect via disorder boundaries. The (011) orientated film shows slightly higher full solar and IR light modulations. The electric resistance results also show that the metal–insulator transition (MIT) of the (011) orientated film presents a larger amplitude, higher sharpness, and narrower hysteresis as compared to the (200) orientated film. The difference in textual structures of the orientated films is the main physical reason that affects the MIT of m-VO2 films.
Published Version
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