Abstract
A system using synchrotron radiation photoelectron spectroscopy (SRPES) is proposed for realtime monitoring of surface chemical bonding. This monitoring was applied to the desorption of antimony from Sb/GaAs(001). The chemical components were clearly resolved on Sb 4d spectra, and changes in their proportions were monitored in situ by raising the sample temperature. The 1×4, 1×3, and 2×4 reflection high energy electron diffraction (RHEED) patterns were observed in sequence. Conventional SRPES of each surface showed that annealing at higher temperature made Ga-Sb bonding more dominant than As-Sb bonding. This is evidence that the chemical state can be controlled using the realtime SRPES monitoring.
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