Abstract
Comprehensive measurements in the vacuum uv range of 1200-3000 A of efficiency, polarization, and scattering of classically ruled and photoresist gratings are reported. The results show that the art of ruling gratings for vacuum uv use has reached a high level of sophistication and that careful analysis of grating properties can lead to useful improvement of the ruling art.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
