Closed form expressions for sheet resistance and mobility from Van-der-Pauw measurement on 90° symmetric devices with four arbitrary contacts

Abstract

Sheet resistance and Hall mobility are commonly measured by Van der Pauw’s method. Closed form expressions are known for four point-sized contacts. Recently, for devices with fourfold rotational symmetry a closed form expression for the sheet resistance was given for contacts of arbitrary size. In this paper we discuss its accuracy, link it to the equivalent circuit diagram of the device, and add another expression that determines the Hall mobility with 0.02% accuracy.