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https://doi.org/10.1016/0040-6090(92)90619-m
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Cite Journal: Thin Solid Films |  Publication Date: Sep 1, 1992 |
 Citations: 101 |
Affiliation: University of Kentucky
High quality c axis oriented zinc oxide (ZnO) thin films have been deposited on glass substrates by low pressure, metal organic vapor deposition, using zinc acetate (Zn(CH 3COO) 2) and H 2O as source materials. Films have been characterized using X-ray diffraction, X-ray photoelectron spectroscopy, and Auger electron spectroscopy.
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