Abstract
Single-crystalline In 2O 3 thin films were obtained on α-Al 2O 3 (0 0 0 1) substrates by the metalorganic chemical vapor deposition (MOCVD) method. The structural, optical and photoluminescence (PL) properties of the In 2O 3 films were investigated in detail. The sample prepared at 650 °C exhibited best crystal quality with body-centered cubic (bcc) structure of pure In 2O 3. The average transmittance for the films in the visible spectral range exceeded 85%. A single and sharp ultra-violet PL peak near 337 nm was observed at room temperature (RT). The corresponding PL mechanisms were investigated.
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