Abstract
All vacuum systems leak but the leaks have been reduced to a point where the desired base pressure can be achieved within a specified time. Over time, it is possible for seals to fail and leaks to increase so that the base pressure cannot be achieved and the coating quality declines due to gas contamination of the coating due to the leak of air into the system during the deposition process. At some point, it will be necessary to identify and reduce or eliminate the leaks. This chapter describes the various leaks and the methods of leak testing. This includes the use of a specialized mass spectrometer that is tuned specifically for helium leak testing.
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