Abstract: Leak testing large vacuum systems

Abstract

Testing of large vacuum systems for leaks may best be described as a problem in high vacuum engineering with leak detection methods as a tool for its accomplishment. Before any leak testing is performed, it is necessary to determine the operating limits for the vacuum system which in turn are used as the boundary conditions for specification of acceptable leak rates. After determination of the leak rates which are acceptable to the overall vacuum system operation, a leak testing system design and procedure is developed to satisfy the leakage criteria. The leak testing philosphy to be followed is little different than any other leak testing problem.Differences found in leak testing of large vacuum systems as compared to laboratory systems are primarily ones of physical magnitude and emphasis. For example, the roughing cycle commonly used on small components, i.e., laboratory vacuum systems and components of less than 50 ft 3 volume, is of little concern when making use of a mass spectrometer leak detector ...