Abstract
It is useful to be able to measure the vacuum that has been obtained in the system both during the pump down and during the process. It is common for the system to use a number of different types of gauges in different parts of the system. It is important to know that some gauges are gas sensitive and the pressure displayed will be reproducible but not an absolute measure of vacuum. This means that two different types of gauge measuring the same vacuum may never read the same value. This chapter describes various different gauges and their advantages and disadvantages.
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