Abstract
In glow discharge ion plating, the gas discharge process is introduced into the evaporation plating machine to produce high-energy electrons, which can ionize the metal film atoms and generate high-energy neutral atoms. This technology can increase the energy of the film particles and promote the nucleation and growth of the film. As a result, the product film has an excellent structure and performance. Glow discharge ion plating machines include the activated reactive evaporation machine, thermionic-enhanced ion plating machine, and high-frequency ion plating machine.
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