Abstract
This chapter introduces the characteristics of vacuum evaporation technology. With this technology, metal atoms are evaporated with heat energy, and the evaporated metal atoms form a thin film on the workpiece surface. Metal evaporation sources include resistance evaporation source, e-type electron gun evaporation source, induction heating evaporation source, and laser evaporation source. In addition, this chapter further explains the nucleation and growth of the film during vacuum evaporation and the influence of vacuum on the film structure. Vertical and winding coating machines are introduced at the end of this chapter.
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