Abstract
Classification of electrochemical micromachining (EMM) has been reported. Different types of EMM techniques such as through-mask EMM, maskless EMM, jet EMM, microdrilling, three-dimensional EMM, die-sinking EMM, EMM by scanning have been described in detail with schematics. New techniques of EMM, such as layer by layer and the sinking and milling method, have been reported for the first time. Experimental results of these new EMM techniques have also been presented to evaluate their performance.
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