Abstract
New developments in micro- and nanotechnology enhanced the application of micro- and nanoelectromechanical systems in various industries. This propagation in the application of micro- and nanostructures necessitates the improvement of novel methods for accurate analysis of ultrasmall systems to achieve reliable design and manufacturing. Continuum mechanics is one of the most popular techniques to simulate micro- and nanostructures, which does not require computational equipment such as molecular dynamics while providing more accurate results compared to simple processes. However, continuum mechanics usually results in highly-nonlinear differential equations with imprecise solutions. In this chapter, some semianalytical approaches for solving nonlinear differential equations are introduced, and the behavior of various nano- and microstructures are investigated based on these methods.
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